Open AccessInvestigations of large area electron beam diodes for excimer lasers. Final report
Publication year - 1993
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10117072
Subject(s) - nanosecond , cathode , materials science , argon , microsecond , plasma , diode , plasma cleaning , optoelectronics , microplasma , atomic physics , analytical chemistry (journal) , chemistry , laser , optics , physics , quantum mechanics , chromatography
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