Open AccessBroadband EUV survey spectrometer for short-timescale experiments
Author(s) -
B. E. Chapman,
D. J. Den Hartog,
R. J. Fonck
Publication year - 1993
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/10116220
Subject(s) - spectrometer , optics , extreme ultraviolet lithography , photodiode , detector , physics , aperture (computer memory) , optoelectronics , materials science , acoustics