Open AccessThermal conductivities of thin, sputtered optical films
Author(s) -
Jr Henager,
W.T. Pawlewicz
Publication year - 1991
Language(s) - English
Resource type - Reports
DOI - 10.2172/10108496
Subject(s) - materials science , nitride , thermal conductivity , aluminium , thin film , boron nitride , amorphous solid , substrate (aquarium) , silicon , silicon nitride , silicon carbide , metal , sputtering , dielectric , carbide , analytical chemistry (journal) , mineralogy , composite material , metallurgy , crystallography , optoelectronics , nanotechnology , layer (electronics) , chemistry , oceanography , chromatography , geology