
Photochemical Vapor Deposition
Author(s) -
Mitsugu Hanabusa
Publication year - 1991
Publication title -
shoumei gakkai zasshi/shoumei gakkaishi/shōmei gakkai zasshi
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.101
H-Index - 4
eISSN - 1349-838X
pISSN - 0019-2341
DOI - 10.2150/jieij1980.75.appendix_235
Subject(s) - deposition (geology) , photochemistry , environmental chemistry , environmental science , materials science , chemistry , geology , paleontology , sediment