Open AccessThe Structural Quality of AlxGa1-xN Epitaxial Layers Grown by Digitally-Alloyed Modulated Precursor Epitaxy Determined by Transmission Electron Microscopy
Author(s) -
Michael E. Hawkridge,
Z. Liliental-Weber,
Hee J. Kim,
Suk Soon Choi,
Dongwon Yoo,
JaeHyun Ryou,
Russell D. Dupuis
Publication year - 2009
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.21236/ada513084
Subject(s) - epitaxy , transmission electron microscopy , materials science , electron microscope , crystallography , optoelectronics , quality (philosophy) , transmission (telecommunications) , chemistry , nanotechnology , optics , computer science , physics , layer (electronics) , telecommunications , quantum mechanics
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