Open AccessMEMS-Based Quartz Oscillators and Filters for On-Chip Integration
Author(s) -
R. L. Kubena,
F. P. Stratton,
D. T. Chang,
R. J. Joyce,
T. Y. Hsu,
M. K. Lim,
Robert T. M’Closkey
Publication year - 2005
Language(s) - English
Resource type - Reports
DOI - 10.21236/ada455656
Subject(s) - microelectromechanical systems , chip , quartz , materials science , optoelectronics , electronic engineering , engineering , electrical engineering , composite material
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