Low Dielectric Constant Insulators and Gold Metallization for GHz Multi-Chip Modules | Zendy

Paul A. Kohl | Zendy; Sue Ann Bidstrup | Zendy

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Low Dielectric Constant Insulators and Gold Metallization for GHz Multi-Chip Modules

Author(s) -

Paul A. Kohl,

Sue Ann Bidstrup

Publication year - 1992

Publication title -

smartech repository (georgia institute of technology)

Language(s) - English

Resource type - Reports

DOI - 10.21236/ada252881

Subject(s) - dielectric , materials science , chip , optoelectronics , constant (computer programming) , high κ dielectric , engineering physics , composite material , electronic engineering , electrical engineering , engineering , computer science , programming language

: The goal of this program is to investigate new dielectrics, metals and processes for the fabrication of multichip modules which hold the promise of exceptional electrical performance in the GHz region in addition to high yield and high reliability. The low dielectric constant insulators are being evaluated through the fabrication of in-situ test structures using noble metals. In the course of doing this evaluation, a simple process for gold or silver MCMs has been investigated.

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