Open AccessVapor Introduction Method for Direct Determination of Phosphorus in Trichlorosilane by Inductively Coupled Plasma Atomic Emission Spectrometry
Author(s) -
Tadashi Mochizuki,
Akiko Sakashita,
Hidehisa Iwata,
Tatsuhito Takahashi
Publication year - 1990
Publication title -
analytical sciences
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.392
H-Index - 73
eISSN - 1348-2246
pISSN - 0910-6340
DOI - 10.2116/analsci.6.303
Subject(s) - trichlorosilane , chemistry , inductively coupled plasma , inductively coupled plasma mass spectrometry , analytical chemistry (journal) , mass spectrometry , plasma , phosphorus , environmental chemistry , chromatography , organic chemistry , nuclear physics , physics , silicon