Open AccessStandard Sample Preparation for the Analysis of Several Metals on Silicon Wafer
Author(s) -
Yoshihiro Mori,
Kengo Shimanoe
Publication year - 1996
Publication title -
analytical sciences
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.392
H-Index - 73
eISSN - 1348-2246
pISSN - 0910-6340
DOI - 10.2116/analsci.12.141
Subject(s) - chemistry , wafer , sample preparation , silicon , sample (material) , analytical chemistry (journal) , environmental chemistry , nanotechnology , chromatography , organic chemistry , materials science