Open AccessSolid state epitaxy of (Hf,Zr)O<sub>2</sub> thin films with orthorhombic phase
Author(s) -
Takanori Kiguchi,
Shōgo Nakamura,
Akihiro Akama,
Takahisa Shiraishi,
Toyohiko J. Konno
Publication year - 2016
Publication title -
journal of the ceramic society of japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.353
H-Index - 56
eISSN - 1882-0743
pISSN - 1348-6535
DOI - 10.2109/jcersj2.16073
Subject(s) - materials science , orthorhombic crystal system , thin film , monoclinic crystal system , epitaxy , crystallography , mosaicity , ferroelectricity , analytical chemistry (journal) , crystal structure , optoelectronics , nanotechnology , chemistry , layer (electronics) , chromatography , dielectric