Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review | Zendy

Ahmad Athif Mohd Faudzi | Zendy; Yaser Sabzehmeidani | Zendy; Koichi Suzumori | Zendy

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Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review

Author(s) -

Ahmad Athif Mohd Faudzi,

Yaser Sabzehmeidani,

Koichi Suzumori

Publication year - 2020

Publication title -

journal of robotics and mechatronics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.257

H-Index - 19

eISSN - 1883-8049

pISSN - 0915-3942

DOI - 10.20965/jrm.2020.p0281

Subject(s) - microelectromechanical systems , automation , robotics , actuator , computer science , manufacturing engineering , robot , engineering , mechanical engineering , systems engineering , artificial intelligence , nanotechnology , materials science

This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about remarkable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, customized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed.

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