Compensation of Measurement Precision for Three-Dimensional Position Measurement Device Based on Disturbance Observer

Improvements in measurement precision will constitute a significant issue in designing control systems formeasurement devices. Specifically, positioning precision may be decreased if unpredicted disturbances from the environment are not taken into account. In this paper, we first estimate unknown disturbances based on the disturbance observer, then design control systems which can reduce the effects of such disturbances to propose a control system capable of compensating for any decreases in measurement precision due to such disturbances, and finally demonstrate the effectiveness of the proposed control system through a series of experiments.