Open AccessConveyor for Pneumatic Two-Dimensional Manipulation Realized by Arrayed MEMS and its Control
Author(s) -
Y. Fukuta,
M. Yanada,
A. Ino,
Yoshio Mita,
Y.A. Chapuis,
Satoshi Konishi,
Hiroyuki Fujita
Publication year - 2004
Publication title -
journal of robotics and mechatronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.257
H-Index - 19
eISSN - 1883-8049
pISSN - 0915-3942
DOI - 10.20965/jrm.2004.p0163
Subject(s) - nozzle , levitation , microelectromechanical systems , compressed air , mechanical engineering , airflow , flow (mathematics) , conveyor system , point (geometry) , flow control (data) , computer science , control theory (sociology) , engineering , materials science , control (management) , mechanics , physics , nanotechnology , artificial intelligence , mathematics , geometry , magnet , computer network
We propose a microconveyor based on silicon microelectromechanical systems (MEMS) technology and demonstrate successful operation of the microconveyor. Microactuators work as air nozzles, which generate directed air flow by changing the pathways of compressed nitrogen gas. One-dimensional conveyance of an object 2.1mm × 4.1mm × 200 μ m weighing approximately 4mg is demonstrated with a directed air flow of 17kPa. Using a two-dimensional conveyor, we levitate and move an object 3mm × 3mm × 100 μ m weighing approximately 2mg using a continuous air flow. Conveyance toward the force equilibrium point was achieved with a regularly pulsed air flow. We are now studying full control of two-dimensional conveyance. We also propose control by actuating air nozzles to change the direction of air flow and move the equilibrium point to transfer the object to the desired point.
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