Development of Micro Actuator Using ER Fluid | Zendy

Akihito SANO | Zendy; Junji FURUSHO | Zendy; Hideo FUJIMOTO | Zendy

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Development of Micro Actuator Using ER Fluid

Author(s) -

Akihito SANO,

Junji FURUSHO,

Hideo FUJIMOTO

Publication year - 1995

Publication title -

journal of robotics and mechatronics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.257

H-Index - 19

eISSN - 1883-8049

pISSN - 0915-3942

DOI - 10.20965/jrm.1995.p0429

Subject(s) - actuator , piston (optics) , mechanical engineering , pneumatic actuator , rotary actuator , cylinder , materials science , computer science , engineering , physics , artificial intelligence , wavefront , optics

In recent years, a great deal of research has been done in the area of micro electro mechanical systems (MEMSs). Among the elements of micro machines, the micro actuator is very important. In this paper, a fluiddriven micro actuator using an electro-rheological (ER) fluid is discussed. The proposed actuator consists of micro valves, a piston and a cylinder. These ER micro valves do not require mechanical parts because they form chain clusters like bridges between the electrodes. As a result, the ER actuator can be driven at 75Hz and generate 60gf.

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