Potential and Challenges of Diamond Wafer Toward Power Electronics
Author(s) -
Shinichi Shikata
Publication year - 2018
Publication title -
international journal of automation technology
Language(s) - English
Resource type - Journals
eISSN - 1883-8022
pISSN - 1881-7629
DOI - 10.20965/ijat.2018.p0175
Subject(s) - wafer , slicing , diamond , materials science , electronics , engineering physics , semiconductor , dislocation , power electronics , power semiconductor device , machining , nanotechnology , optoelectronics , mechanical engineering , electrical engineering , engineering , metallurgy , composite material , voltage
To achieve a 50% worldwide reduction of CO 2 by the middle of this century, development of energy saving power device technology using wide bandgap materials is urgently needed. Diamond is receiving increasing attention as a next generation material for wide bandgap semiconductors owing to its extreme characteristics. Research studies investigating large wafers, low resistivity, and low dislocation have accelerated. This study targets the use of wafers for power electronics applications, and the required machining technologies for diamond, including wafer shaping, slicing, and surface finishing, are introduced.
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