A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe | Zendy

Terutake Hayashi | Zendy; Toshiki Seri | Zendy; Syuhei KUROKAWA | Zendy

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A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe

Author(s) -

Terutake Hayashi,

Toshiki Seri,

Syuhei KUROKAWA

Publication year - 2017

Publication title -

international journal of automation technology

Language(s) - English

Resource type - Journals

eISSN - 1883-8022

pISSN - 1881-7629

DOI - 10.20965/ijat.2017.p0754

Subject(s) - sizing , viscosity , materials science , nano , nanoparticle , brownian motion , slurry , particle (ecology) , nanoscopic scale , abrasive , diffusion , nanotechnology , composite material , chemistry , thermodynamics , physics , oceanography , organic chemistry , geology , quantum mechanics

In this study, a novel particle sizing method is proposed based on Brownian diffusion analysis for abrasive particles using fluorescent probing. A fluorescent probe is used to measure the average dynamic viscosity of the nanoparticle dispersion in a solvent. By measuring both the average dynamic viscosity and the size of the nanoscale abrasive particles simultaneously, the uncertainty of the particle sizing is considered to be improved based on the viscosity compensation for the Brownian diffusion of nanoparticles. In this research, the authors investigate the difference between the nanoviscosity and the shear viscosity of the solvent to verify the efficacy in using viscosity compensation for nanoparticle sizing.

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