Influence of Tool Run-Out on Machining Accuracy with Multi-Tooth Endmill | Zendy

Daisuke Goto | Zendy; Yukio MAEDA | Zendy; Hideaki Tanaka | Zendy; Kazuya Kato | Zendy; Takanori Yazawa | Zendy

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Influence of Tool Run-Out on Machining Accuracy with Multi-Tooth Endmill

Author(s) -

Daisuke Goto,

Yukio MAEDA,

Hideaki Tanaka,

Kazuya Kato,

Takanori Yazawa

Publication year - 2016

Publication title -

international journal of automation technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.513

H-Index - 18

eISSN - 1883-8022

pISSN - 1881-7629

DOI - 10.20965/ijat.2016.p0759

Subject(s) - groove (engineering) , machining , photolithography , photoresist , substrate (aquarium) , materials science , chip , mechanical engineering , engineering drawing , engineering , nanotechnology , electrical engineering , geology , oceanography , layer (electronics)

Micro-channel chips, which are used in micro total analysis systems, are attracting attention in the medical field. The photolithography technology used in semiconductor manufacturing is generally used to manufacture micro-channel chip dies. However, this technology requires many processes, such as mask fabrication and the application of photoresist to a substrate, as well as expensive clean room facilities. Therefore, this study examines an approach to form a fine groove by cutting with micro-endmills, and experimentally examined a method for reducing the influence of tool run-out on machining accuracy with multi-tooth endmills. As a result, the effects of tool run-out on micro-groove milling, such as a decrease in groove increment, are clarified.

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