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The authors have previously developed a compact, light-weight air flow control valve, which realizes continuous flow control. The vibration produced by a piezoelectric device (PZT) was used to excite particles confined in a flow channel to control the valve opening for the developed control valve. Therefore, the voltage applied to the PZT can be changed to continuously control the flow rate. A new working principle was developed for the control valve to stabilize flow rate characteristics. Different types of particles were used to change the valve opening condition. A prototype was manufactured to demonstrate the effectiveness of the control valve.

Development of Novel Particle Excitation Flow Control Valve for Stable Flow Characteristics