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In a precision positioning device, positioning errors due to thermal deformation arise from heat generated by the motor and by friction between the ball screw and the nut. However, their proportional contributions to thermal deformation are not clear. In this study, thermal deformation was reduced by cooling the motor with Peltier elements, which had a beneficial effect on the precision of the positioning device.

Reduction of Thermal Deformation in a Motor Precision Positioning Device Cooled by Peltier Elements