Development of Inspection Machine that Detect Small Particles Added on Surface with Precise Pattern by Capturing Backwards Scattered Polarized Light | Zendy

Tsuyoshi Nomura | Zendy; Tatsuo Nagasaki | Zendy; Masami Itō | Zendy

Open Access

Development of Inspection Machine that Detect Small Particles Added on Surface with Precise Pattern by Capturing Backwards Scattered Polarized Light

Author(s) -

Tsuyoshi Nomura,

Tatsuo Nagasaki,

Masami Itō

Publication year - 2012

Publication title -

international journal of automation technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.513

H-Index - 18

eISSN - 1883-8022

pISSN - 1881-7629

DOI - 10.20965/ijat.2012.p0781

Subject(s) - wafer , optics , laser light , line (geometry) , physics , laser , particle (ecology) , materials science , optoelectronics , geometry , oceanography , geology , mathematics

The paper discusses the development of inspectionmachine to detect small particle by capturing backwards scattered polarized light. The proposed optical system consists of very low angle (2°) horizontal line laser light with S polarized characteristics and angle 150° backwards line CCD Camera to capture P polarized light from particles on wafer or glass and so on. This system is confirmed to apply the real production of wafer or glass.

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