Development of High Speed Clock Module and its Application to Array Model

A high speed optical clock module using a Vertical Cavity Surface Emitting Laser (VCSEL) and a spherical mirror is developed and this clock module is applied to an array model. The module will be used for Large Scale Integration (LSI) clock distribution. We developed a single module successfully, frequency of which was 39 GHz with a low threshold current. Moreover, we improved an assembly method for the module, proposed an array model design of this module, and assembled the array model. The array model was cut into four pieces. As a result, it was made clear to manufacture the module model by pasting and cutting accurately, and to manufacture a great amount of modules from array module, too.