Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle | Zendy

Yasuhiro Takaya | Zendy; Masaki Michihata | Zendy; Terutake Hayashi | Zendy

Open Access

Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle

Author(s) -

Yasuhiro Takaya,

Masaki Michihata,

Terutake Hayashi

Publication year - 2011

Publication title -

international journal of automation technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.513

H-Index - 18

eISSN - 1883-8022

pISSN - 1881-7629

DOI - 10.20965/ijat.2011.p0395

Subject(s) - microprobe , optics , wafer , materials science , resolution (logic) , displacement (psychology) , interferometry , silicon , particle (ecology) , lens (geology) , standing wave , optoelectronics , physics , psychology , oceanography , nuclear physics , psychotherapist , geology , artificial intelligence , computer science

The new scanning type microprobe, based on a standing wave pattern as the interferometric scale and an optically trapped microprobe as the sensing probe to read the scale, is proposed. To confirm the measurement principle the fundamental investigation was conducted experimentally and the properties such as the accuracy, the resolution and the measurable range are evaluated. The feasibility as amicro-displacement sensor is indicated by measurement results of a silicon wafer surface and a silicon sphere. In order to investigate the ability of three-dimensional measurement the scanning measurement of a micro spherical lens with a diameter of 2 mm is carried out.

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