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Glass cutting with a multiedge tool is presented to machine micro-scale grooves at high machining rates in a planning manner. The critical depth of cut at the ductile-brittle transition was measured to design the edge shape in the glass cutting tests. 13 rectangular edges 2 µm wide and 2 µm high were manufactured on a single crystal diamond tool by the focused ion beam. The cutting tests were conducted on a micro/nano-scale cutting machine, which controls the depth of cut of less than 1 µm. The glass cutting process with the multiedge tool is discussed with measuring the cutting force. The cutting force changes with the cutting mode: sliding/ploughing and cutting. Based on the measured cutting force, the compliance of the machine-tool-workpiece system, the friction coefficient of the tool on the glass surface and the specific cutting force are estimated. Then, 13 grooves 2 µm wide 0.3 µm deep were machined simultaneously in a feed of the multiedge tool. The machining accuracy was verified in optical diffraction tests.

Micro Cutting of Glass with Multiedge Tool