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Industrial demands for ultra-precision machining have rapidly increased in a wide range of industries, e.g., aerospace, semiconductors, optics, molds, etc. In particular, various structured surfaces with micro- and nano-sized patterns have recently been required for advanced science and engineering fields. In order to rationally meet such requirements, it is indispensable to develop an ultra-precision machine tool with both nanometer-level machining accuracy and a large machining area. In this paper, therefore, the design concept and structural configuration of a desirable ultra-precision machine tool are proposed based on a new design concept. The machine tool developed here has a perfect non-contact structure and achieves three-dimensional nano-machining over a wide area with nanometer spatial resolution.

Design Concept and Structural Configuration of Advanced Nano-Pattern Generator with Large Work Area “ANGEL”