Processing Micro Reactor by Non-Rotational Cutting Tool with Ultrasonic Vibration

In recent years, a micro reactor used in the chemical field is capable of compounding reagents by the fine passage that intersects with in a complicated manner. The micro reactor is requested to have a high-quality finish because it uses not only a general acryl material, but also a hard vulnerable material such as a glass with excellent corrosion resistance. Etching technology is used as a method to provide a fine groove, but it requires tremendous amounts of money. This study attempts to manufacture the micro reactor using micro cutting by a non-rotational tool to process hard vulnerable materials. Processing in the ductile mode is indispensable for processing of a hard vulnerable material such as a glass. If this is realized, a good finish can be obtained. In this report, processing using ultrasonic vibration is performed as a means to implement processing in the ductile mode. We made a comparison with a finish by end mill tool and confirmed an increase in the infeed and the effect of cutting in water on the finish. We performed experiments on cutting the micro reactor under the optimum condition and confirmed that a non-rotational tool could process a hard vulnerable material. The following is a report of this matter.