Nanometer-/Subnanometer-Positioning Technology Using Feeding Mechanism | Zendy

Jiro OTSUKA | Zendy

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Nanometer-/Subnanometer-Positioning Technology Using Feeding Mechanism

Author(s) -

Jiro OTSUKA

Publication year - 2008

Publication title -

international journal of automation technology

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.513

H-Index - 18

eISSN - 1883-8022

pISSN - 1881-7629

DOI - 10.20965/ijat.2008.p0004

Subject(s) - nanometre , microprocessor , mechanism (biology) , positioning system , engineering , displacement (psychology) , ball (mathematics) , nanotechnology , mechanical engineering , materials science , electrical engineering , physics , psychology , structural engineering , chemical engineering , node (physics) , psychotherapist , mathematical analysis , mathematics , quantum mechanics

Positioning devices with nanometer resolution, although not yet widely used, will be used to test nextgeneration LSI, DVD, DNA, etc., expected to become within the next 5 to 10 years. We review nanometer and subnanometer positioning accuracy and resolution technologies, focusing on feed mechanisms using ball screws and linear motors, together with microprocessor-controlled displacement sensors for positioning feedback control.

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