Open AccessSome features of the substrate surface planarization for products of micro- and nanosystem technologies
Author(s) -
В.В. Холевин
Publication year - 2013
Publication title -
inženernyj žurnal: nauka i innovacii
Language(s) - English
Resource type - Journals
ISSN - 2308-6033
DOI - 10.18698/2308-6033-2013-6-803
Subject(s) - chemical mechanical planarization , substrate (aquarium) , nanotechnology , materials science , surface (topology) , computer science , layer (electronics) , mathematics , geology , geometry , oceanography