Open AccessCharacteristics of low-resistance path in silicon suboxide thin films
Author(s) -
П.С. Захаров,
В.С. Зайончковский,
Е.Б. Баскаков
Publication year - 2013
Publication title -
inženernyj žurnal: nauka i innovacii
Language(s) - English
Resource type - Journals
ISSN - 2308-6033
DOI - 10.18698/2308-6033-2013-6-797
Subject(s) - suboxide , materials science , silicon , thin film , resistance (ecology) , path (computing) , composite material , optoelectronics , nanotechnology , computer science , operating system , ecology , biology