Open AccessMEMS laboratory practice
Author(s) -
Г.В. Попов
Publication year - 2013
Publication title -
inženernyj žurnal: nauka i innovacii
Language(s) - Uncategorized
Resource type - Journals
ISSN - 2308-6033
DOI - 10.18698/2308-6033-2013-2-560
Subject(s) - microelectromechanical systems , engineering , computer science , materials science , nanotechnology