Teaching Engineering And Technology Students To Develop Genetic Algorithms For The Design Of Energy Systems | Zendy

Murray Teitell | Zendy

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Teaching Engineering And Technology Students To Develop Genetic Algorithms For The Design Of Energy Systems

Author(s) -

Murray Teitell

Publication year - 2020

Publication title -

2009 annual conference and exposition proceedings

Language(s) - English

Resource type - Conference proceedings

DOI - 10.18260/1-2--5184

Subject(s) - mechatronics , plan (archaeology) , class (philosophy) , renewable energy , engineering management , computer science , joins , energy consumption , energy (signal processing) , engineering , artificial intelligence , electrical engineering , mathematics , statistics , archaeology , history , programming language

PCT No. PCT/JP97/00477 Sec. 371 Date Aug. 14, 1998 Sec. 102(e) Date Aug. 14, 1998 PCT Filed Feb. 21, 1997 PCT Pub. No. WO97/31389 PCT Pub. Date Aug. 28, 1997A thermal processing apparatus for a semi-conductor wafer. A holder is provided within a processing vessel on which the wafer to be processed is placed. Upper and lower heaters are provided above and below the holder in order to heat the wafer. Each of the heaters are attached within heating vessels. A gas supply head supplies a processing gas in a shower form between the upper heater and the holder. The uniformity of the surface temperature of the wafer is improved by heating the wafer from both above and below.

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