Mems Fabrication As A Multidisciplinary Laboratory
Author(s) -
Todd Kaiser,
Andrew Lingley,
Matt Leone,
Brad Pierson
Publication year - 2020
Publication title -
2007 annual conference and exposition proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.18260/1-2--1768
Subject(s) - multidisciplinary approach , fabrication , microelectromechanical systems , computer science , engineering , nanotechnology , materials science , medicine , pathology , sociology , social science , alternative medicine
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