“MUMPs” Multi-User-MEMS-Processes as Teaching and Design Tools in MEMS Instruction

The paper describes use of “MUMPs” (Multi-User-MEMS-Processes) as a platform to teach Silicon based MEMS technologies and to implement design projects in a new interdisciplinary senior level undergraduate engineering course offered at the University of Southern Maine. In addition to the standard lectures/reading/homeworks/tests routine of a typical coursework students in this class are assigned to design, both as homeworks and as individual class term projects, various sensors using integrated circuit layout design tools and standard Silicon MEMS technologies available and known as “MUMPs” (Multi-User-MEMS-Processes). The SiliconOn-Insulator version of MUMPs which is named “SOI-MUMPs” was chosen for the final projects. Thanks to the funding received from NASA/MSGC successfully completed designs are combined to form a multi-project MEMS chip and sent out to be fabricated. The multi-project MEMS chips fabricated are packaged and wire bonded in house for testing. In the first year offering of the course “Impact” or “Crash” Sensors were designed and fabricated. In the second offering of the course “Capacitive Acceleration Sensors” were designed. On the side, senior projects assigned have created the platforms to test these sensors, namely, an accelerator which can create centrifugal g-forces up to 20g’s and a capacitive sensor computer interface with femtoFarad resolution. Examples of designs, simulations, test equipment and setups used and the results obtained will be presented to share this experience with the faculty and students attending the conference from other institutions.