Open AccessAnalysis of the combined mode resonance in aluminum nitride MEMS resonators
Author(s) -
Eric Walther-Grant
Publication year - 2015
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.17760/d20195508
Subject(s) - resonator , figure of merit , coupling (piping) , finite element method , resonance (particle physics) , coupling coefficient of resonators , mode (computer interface) , materials science , scalability , q factor , acoustics , microelectromechanical systems , electronic engineering , computer science , optoelectronics , physics , engineering , mechanical engineering , structural engineering , particle physics , database , operating system
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