Open AccessMonolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems
Author(s) -
Gwendolyn Hummel
Publication year - 2015
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.17760/d20194504
Subject(s) - resonator , microelectromechanical systems , electronic engineering , radio frequency , bandwidth (computing) , center frequency , realization (probability) , materials science , optoelectronics , engineering , electrical engineering , band pass filter , telecommunications , statistics , mathematics
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