Open AccessAluminum nitride MEMS resonant thermal biosensors
Author(s) -
Raul Vyas
Publication year - 2014
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.17760/d20194280
Subject(s) - materials science , nitride , optoelectronics , bandwidth (computing) , detector , resonator , biosensor , microelectromechanical systems , nanotechnology , electronic engineering , electrical engineering , engineering , telecommunications , layer (electronics)
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