Open AccessAluminum nitride piezoelectric microelectromechanical resonant physical sensors
Author(s) -
Hui Yu
Publication year - 2015
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.17760/d20193863
Subject(s) - miniaturization , microelectromechanical systems , accelerometer , nanoelectromechanical systems , wireless , gyroscope , electrical engineering , power consumption , wireless sensor network , resonator , automotive industry , electronic engineering , embedded system , engineering , materials science , computer science , nanotechnology , power (physics) , telecommunications , aerospace engineering , physics , quantum mechanics , nanoparticle , operating system , computer network , nanomedicine
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