Open AccessAn experimental investigation of hot switching contact damage in RF MEMS switches
Author(s) -
Anirban Basu
Publication year - 2013
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.17760/d20004845
Subject(s) - materials science , microelectromechanical systems , optoelectronics , diode , pillar , reliability (semiconductor) , electrical engineering , structural engineering , engineering , power (physics) , physics , quantum mechanics
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