Open AccessNon distructive nanoparticle removal from sub-micron structures using megasonic cleaning
Author(s) -
Pegah Karimi
Publication year - 2009
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.17760/d20000671
Subject(s) - wafer , nanoscopic scale , materials science , acoustic streaming , nanotechnology , silicon , nanostructure , cavitation , nanoparticle , particle (ecology) , optoelectronics , semiconductor , acoustics , ultrasonic sensor , oceanography , physics , geology
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