Application of the x-ray photoelectron spectroscopy for development of the niobium chemical mechanical process, photomodification of silicon for the field release mass spectrometer, and analysis of the multifunctional oxide heterostructures
Author(s) -
Natalia Maximova
Publication year - 2008
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.17760/d10017975
Subject(s) - x ray photoelectron spectroscopy , niobium oxide , niobium , materials science , silicon , monolayer , oxide , analytical chemistry (journal) , wafer , chemical engineering , nanotechnology , chemistry , optoelectronics , organic chemistry , metallurgy , engineering
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