Open AccessMEMS testbed for accelerated testing of nanoelements
Author(s) -
Juan Carlos Rueda
Publication year - 2008
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.17760/d10017288
Subject(s) - materials science , microelectromechanical systems , wafer , silicon on insulator , resonator , fabrication , optoelectronics , silicon , nanowire , temperature cycling , composite material , thermal , medicine , alternative medicine , physics , pathology , meteorology
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