Open AccessNUMERICAL ANALYSIS OF THE KINETICS OF CHEMICAL REACTIONS IN AN ARGON-SILANE PLASMA OF THE GLOW DISCHARGE
Author(s) -
A. A. Lyakhov,
В. И. Струнин
Publication year - 2017
Publication title -
vestnik tomskogo gosudarstvennogo universiteta matematika i mekhanika
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.246
H-Index - 5
eISSN - 2311-2255
pISSN - 1998-8621
DOI - 10.17223/19988621/50/7
Subject(s) - silane , argon , kinetics , plasma , glow discharge , chemical kinetics , chemical reaction , chemistry , materials science , analytical chemistry (journal) , organic chemistry , physics , nuclear physics , quantum mechanics
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