Ion Implantation and Annealing of SrTiO3 and CaTiO3 | Zendy

C. W. White | Zendy; L. A. Boatner | Zendy; J. Rankin | Zendy; Michael J. Aziz | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Ion Implantation and Annealing of SrTiO₃ and CaTiO₃

Author(s) -

C. W. White,

L. A. Boatner,

J. Rankin,

Michael J. Aziz

Publication year - 1987

Publication title -

mrs proceedings

Language(s) - English

Resource type - Journals

eISSN - 1946-4274

pISSN - 0272-9172

DOI - 10.1557/proc-93-9

Subject(s) - materials science , annealing (glass) , epitaxy , amorphous solid , recrystallization (geology) , ion implantation , ion , crystallography , analytical chemistry (journal) , nanotechnology , metallurgy , chemistry , paleontology , organic chemistry , layer (electronics) , chromatography , biology

Ion implantation damage and thermal annealing results are presented for single crystals of SrTiO3 and CaTiO3. The near-surface region of both of these materials can be made amorphous by low doses (approx.10 V/cmS) of heavy ions (Pb at 540 keV). During annealing, the amorphous implanted region crystallizes epitaxially on the underlying single-crystal substrate. The kinetics of this solid-phase epitaxial recrystallization process have been measured by employing ion channeling techniques.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research