Open AccessLaser Microfabrication Technology and its Application to High Speed Interconnect of Gate Arrays
Author(s) -
Anthony F. Bernhardt,
Bruce M. McWilliams,
Fred Mitlitsky,
J. Christopher Whitehead
Publication year - 1986
Publication title -
mrs proceedings
Language(s) - English
Resource type - Journals
eISSN - 1946-4274
pISSN - 0272-9172
DOI - 10.1557/proc-75-633
Subject(s) - materials science , laser , optoelectronics , interconnection , layer (electronics) , deposition (geology) , nanotechnology , optics , computer science , computer network , paleontology , physics , sediment , biology
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