Open AccessLinking ab initio Energetics to Experiment: Kinetic Monte Carlo Simulation of Transient Enhanced Diffusion of B in Si
Author(s) -
Silva K. Theiss,
M.J. Caturla,
T. Dı́az de la Rubia,
Morris C. Johnson,
Ant Uralt,
Peter B. Griffin
Publication year - 1998
Publication title -
mrs proceedings
Language(s) - English
Resource type - Journals
eISSN - 1946-4274
pISSN - 0272-9172
DOI - 10.1557/proc-538-291
Subject(s) - kinetic monte carlo , materials science , diffusion , monte carlo method , kinetic energy , ab initio , thermodynamics , pseudopotential , molecular dynamics , statistical physics , computational chemistry , atomic physics , chemistry , physics , classical mechanics , statistics , mathematics , organic chemistry
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