Open AccessMeasurements Of Stress Evolution During Thin Film Deposition
Author(s) -
Eric Chason,
J. A. Floro
Publication year - 1996
Publication title -
mrs proceedings
Language(s) - English
Resource type - Journals
eISSN - 1946-4274
pISSN - 0272-9172
DOI - 10.1557/proc-428-499
Subject(s) - materials science , radius of curvature , deflection (physics) , curvature , wafer , optics , thin film , composite material , optoelectronics , nanotechnology , mean curvature , geometry , physics , mathematics , mean curvature flow
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