Open AccessIn-Situ X-Ray Reflectivity Study on Growth Dynamics of Sputter Deposited Gold on Silicon
Author(s) -
R. P. Chiarello,
H. K. Kim,
T. Roberts,
Dean J. Miller,
R. T. Kampwirth,
K. E. Gray,
Hoydoo You
Publication year - 1991
Publication title -
mrs proceedings
Language(s) - English
Resource type - Journals
eISSN - 1946-4274
pISSN - 0272-9172
DOI - 10.1557/proc-237-411
Subject(s) - materials science , silicon , substrate (aquarium) , sputtering , sputter deposition , surface finish , deposition (geology) , x ray reflectivity , surface roughness , optics , optoelectronics , analytical chemistry (journal) , thin film , nanotechnology , metallurgy , composite material , chemistry , paleontology , oceanography , physics , chromatography , sediment , biology , geology
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