Control of Texture During Vapor Deposition of Al on (111) Si
Author(s) -
N. Thangaraj,
J. ReyesGasga,
K.H. Westmacott,
U. Dahmen
Publication year - 1991
Publication title -
mrs proceedings
Language(s) - English
Resource type - Journals
eISSN - 1946-4274
pISSN - 0272-9172
DOI - 10.1557/proc-221-81
Subject(s) - materials science , texture (cosmology) , chemical vapor deposition , crystallography , diffraction , electron diffraction , lattice (music) , electron microscope , chemical engineering , nanotechnology , optics , computer science , image (mathematics) , chemistry , artificial intelligence , physics , engineering , acoustics
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