Open AccessIon Beam Synthesis of Buried Single Crystal Erbium Silicide
Author(s) -
A. Golański,
R. M. Feenstra,
M. D. Galloway,
J. L. Park,
S. J. Pennycook,
H. E. Harmon,
C. W. White
Publication year - 1990
Publication title -
mrs proceedings
Language(s) - English
Resource type - Journals
eISSN - 1946-4274
pISSN - 0272-9172
DOI - 10.1557/proc-201-319
Subject(s) - materials science , silicide , annealing (glass) , crystallography , ion implantation , epitaxy , coalescence (physics) , optoelectronics , erbium , ion , silicon , layer (electronics) , composite material , doping , chemistry , physics , organic chemistry , astrobiology
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