Open AccessOptical Characterization of Nano-crystallized AlN: Er Films Prepared by Magnetron Sputtering
Author(s) -
V. Brien,
Manuel Dossot,
H. Rinnert,
Sajjad Hussain Sajjad,
Bernard Humbert,
P. Pigeat
Publication year - 2008
Publication title -
materials research society symposium proceedings
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1557/proc-1111-d02-03
Subject(s) - materials science , photoluminescence , sputter deposition , amorphous solid , sputtering , doping , optoelectronics , crystallite , erbium , thin film , nanotechnology , crystallography , metallurgy , chemistry
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