Open AccessAtomic layer deposition of zirconium oxide thin films
Author(s) -
Xin Wang,
Sujan Ghosh,
Mahyar AfsharMohajer,
Hua Zhou,
Yongqiang Liu,
Xiaoxiao Han,
Jiyu Cai,
Min Zou,
Xiangbo Meng
Publication year - 2019
Publication title -
journal of materials research/pratt's guide to venture capital sources
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.788
H-Index - 148
eISSN - 0884-2914
pISSN - 0884-1616
DOI - 10.1557/jmr.2019.338
Subject(s) - materials science , atomic layer deposition , thin film , layer (electronics) , zirconium , deposition (geology) , layer by layer , atomic layer epitaxy , oxide , chemical engineering , nanotechnology , metallurgy , paleontology , sediment , engineering , biology
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